Miniature Silicon Nanobeam Resonator Tuned by GST Phase Change Material
Zhou, L., Zhang, H., Hu, H. , Lu, L., Chen, J. & Rahman, B. M. 
ORCID: 0000-0001-6384-0961 (2018).
Miniature Silicon Nanobeam Resonator Tuned by GST Phase Change Material.
In:
CLEO Pacific Rim Conference.
Conference on Lasers and Electro-Optics/Pacific Rim 2018, 29 Jul - 3 Aug 2018, Hong Kong, China.
Abstract
We report a silicon optical nanobeam resonator with central hole infiltrated with a thin layer of Ge2Sb2Te5 (GST) material. The resonances can be tuned when the GST changes its phases between the amorphous and crystalline states.
| Publication Type: | Conference or Workshop Item (Paper) |
|---|---|
| Additional Information: | © 2018 Optical Society of America. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modifications of the content of this paper are prohibited. |
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering |
| Departments: | School of Science & Technology > Engineering |
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Official URL: https://doi.org/10.1364/CLEOPR.2018.W4D.6
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