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Miniature Silicon Nanobeam Resonator Tuned by GST Phase Change Material

Zhou, L., Zhang, H., Hu, H. , Lu, L., Chen, J. & Rahman, B. M. ORCID: 0000-0001-6384-0961 (2018). Miniature Silicon Nanobeam Resonator Tuned by GST Phase Change Material. Paper presented at the Conference on Lasers and Electro-Optics/Pacific Rim 2018, 29 Jul - 3 Aug 2018, Hong Kong, China.


We report a silicon optical nanobeam resonator with central hole infiltrated with a thin layer of Ge2Sb2Te5 (GST) material. The resonances can be tuned when the GST changes its phases between the amorphous and crystalline states.

Publication Type: Conference or Workshop Item (Paper)
Additional Information: © 2018 Optical Society of America. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modifications of the content of this paper are prohibited.
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering
Departments: School of Science & Technology > Engineering > Electrical & Electronic Engineering
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