City Research Online

Abstract

A compact and integrated label-free refractometric bio-chemical sensor based on silicon-on-insulator (SOI) is proposed and comprehensively studied at the telecommunication wavelength of λ = 1550 nm. This device incorporated a three-dimensional (3D) Fabry-Perot cavity in the nano-scale regime with maximum footprint area around 470 × 473 nm2. A resonance shift (Δλres) of 5.2 nm is reported for an ultrathin (5 nm) bio-layer sensing. Besides, an improved maximum sensitivity (S = 820 nm/RIU) is also achieved for bulk refractive index change in surroundings. As a chemical sensor, very low detection limit (DL = 6.1 × 106 RIU) also can be possible to achieve by this device. All the numerical investigations and optimizations were carried out in frequency domain by a numerically efficient and rigorous full vectorial H-field based 2-D and 3-D finite element methods (FEM). A 3D-FEM code is developed and used to find out the wavelength dependencies of the resonator. Possibility of easy CMOS fabrication and integration opportunities make this structure as a prospective and efficient lab-on-chip device.

Publication Type:	Article
Additional Information:	© 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/ republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works.
Subjects:	T Technology > TA Engineering (General). Civil engineering (General)
Departments:	School of Science & Technology > Engineering
SWORD Depositor:	Symplectic Administrator

Export

Downloads